DARPA Creates Microscale Pumps to Evacuate Tiny Vacuum Chambers

DARPA Creates Microscale Pumps to Evacuate Tiny Vacuum Chambers

By Geraldine Cook
June 14, 2013

DARPA-funded researchers recently demonstrated the world’s smallest vacuum pumps. This breakthrough technology may create new national security applications for electronics and sensors that require a vacuum: highly sensitive gas analyzers that can detect chemical or biological attacks, extremely accurate laser-cooled chip-scale atomic clocks and micro-scale vacuum tubes.

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